Energy Dispersive X-Ray (EDS or EDX)
Key Benefits
- Elemental composition of materials
- Element mapping capabilities of foreign materials
- Quick and economical
- Quantitative analysis achievable
- Excellent spatial resolution when combined with STEM
Capabilities
- Identification of foreign material on a sub micron scale
- Complementary information to SEM, WDS, CL, EBSD
- Increased spatial resolution with STEM
