X-Ray Photoelectron Spectroscopy (XPS)
Key Benefits of XPS analysis
- X-Ray Photoelectron Spectroscopy (XPS) sensitivity at 0.1 At%
- Quantitative chemical information of the first 10nm atomic layers
- Oxidation state information of elements on the surface
- Multi sample capability
- Advanced failure analysis capability
Capabilities in NIMAC
- Chemical information on the first 5-10nm
